HGPC - 100


Enables inline measurement of semiconductor special material gases

• Simultaneous 5-channels particle measurement 0.1 μm and above, 0.15 μm and above, 0.2 μm and above, 0.3 μm and above, 0.5 μm and above .

• Rated flow rate: 100 mL/min, max. 300 mL/min.

• Direct measurement of inert gas as well as corrosive, reactive and other gases.

• Realizes leak-tight, outgas-free conditions without dead space.

• Supports to N2 , CO2 , Ar , He , CDA , etc.

• Explosion-proof design for H2, O2,etc.



Optical system

• Sideway light-scattering system

Light source

• Laser diode (wavelength: 830 nm, max. rated output: 200 mW)

Laser product class

• Class 1, IEC 60825-1:2001

Sample flow rate

• 100 mL/min

Sample flow range

• 50 to 300 mL/min

Particle size measurement range (5 channels)

• 0.1 μm and above, 0.15 μm and above, 0.2 μm and above,0.3 μm and above, 0.5 μm and above

Counting efficiency

• 50 % ± 10 %

Maximum particle number concentration

• 30,000 particles/min(counting loss within 5 %)

Materials of component parts exposed to sample gas

• Synthetic quartz, SUS316L (EP polished), fluorine-containing rubber (JIS4 type D)