HGPC - 100
Enables inline measurement of semiconductor special material gases
• Simultaneous 5-channels particle measurement 0.1 μm and above, 0.15 μm and above, 0.2 μm and above, 0.3 μm and above, 0.5 μm and above .
• Rated flow rate: 100 mL/min, max. 300 mL/min.
• Direct measurement of inert gas as well as corrosive, reactive and other gases.
• Realizes leak-tight, outgas-free conditions without dead space.
• Supports to N2 , CO2 , Ar , He , CDA , etc.
• Explosion-proof design for H2, O2,etc.
Optical system
• Sideway light-scattering system
Light source
• Laser diode (wavelength: 830 nm, max. rated output: 200 mW)
Laser product class
• Class 1, IEC 60825-1:2001
Sample flow rate
• 100 mL/min
Sample flow range
• 50 to 300 mL/min
Particle size measurement range (5 channels)
• 0.1 μm and above, 0.15 μm and above, 0.2 μm and above,0.3 μm and above, 0.5 μm and above
Counting efficiency
• 50 % ± 10 %
Maximum particle number concentration
• 30,000 particles/min(counting loss within 5 %)
Materials of component parts exposed to sample gas
• Synthetic quartz, SUS316L (EP polished), fluorine-containing rubber (JIS4 type D)